Chlorosilane sampler with ceramic valve core needle valve

The invention discloses a chlorosilane sampler with a ceramic spool needle valve, which belongs to the technical field of samplers and comprises a coil cooler. A support is arranged at the bottom end of the coiled tube type cooler, a ceramic sealing sample injection valve is arranged at the upper en...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAN YI, MOU TONG, YUN YONGLI, ZHU TANGMAO, KANG ANQUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a chlorosilane sampler with a ceramic spool needle valve, which belongs to the technical field of samplers and comprises a coil cooler. A support is arranged at the bottom end of the coiled tube type cooler, a ceramic sealing sample injection valve is arranged at the upper end of the coiled tube type cooler, a first medium inlet is formed in the upper end of the ceramic sealing sample injection valve, a filter is arranged on one side of the ceramic sealing sample injection valve, a sampling valve is arranged on one side of the filter, and a nitrogen purging valve is arranged at the upper end of the sampling valve. According to the invention, the problem of leakage caused by serious abrasion of a valve core due to crystal particles contained in a sample during sampling is effectively solved, and the problem that a sample medium has special corrosion to metal is effectively solved; when a metal valve element is used, the problem that the metal content exceeds the standard can occur in a