Faraday cup structure and electron beam detection equipment

The invention belongs to the technical field of electron beam detection, and particularly relates to a Faraday cup structure and electron beam detection equipment. The Faraday cup structure comprises an electric field forming assembly and a receiving assembly, wherein the electric field forming asse...

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Hauptverfasser: SHI PEIRU, LI SHUAICHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of electron beam detection, and particularly relates to a Faraday cup structure and electron beam detection equipment. The Faraday cup structure comprises an electric field forming assembly and a receiving assembly, wherein the electric field forming assembly and the receiving assembly are electrically insulated; the electric field forming assembly and the receiving assembly are matched to form a passage for the electron beam to pass through to enter the receiving assembly; the electric field forming assembly can be connected with voltage to form a suppression electric field layer at the passage, and the projection of the suppression electric field layer in the axial direction of the passage at least covers the passage. In the Faraday cup structure, the suppression electric field layer capable of preventing electrons from escaping is formed on the outer side of the receiving assembly by using the electric field forming assembly, so that the electrons in the receivi