Defect detection method and device, electronic equipment and storage medium
The invention provides a defect detection method and apparatus, an electronic device and a storage medium. The method comprises the steps of obtaining a to-be-detected image for a to-be-detected chip; wherein the surface of the to-be-tested chip comprises N sphere structures; n is an integer greater...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a defect detection method and apparatus, an electronic device and a storage medium. The method comprises the steps of obtaining a to-be-detected image for a to-be-detected chip; wherein the surface of the to-be-tested chip comprises N sphere structures; n is an integer greater than or equal to 1; determining a first position parameter of the to-be-tested chip in the to-be-tested image; determining a conversion parameter of the to-be-tested image according to a first position parameter of the to-be-tested chip in the to-be-tested image and a second position parameter of the to-be-tested chip in the reference image; converting a to-be-detected image by using the conversion parameter to obtain a target image; based on the target image and the reference image, determining detection related parameters for the surface sphere structure of the to-be-detected chip; obtaining a detection result of the to-be-detected chip based on the detection related parameters; the detection result is used for |
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