Defect detection method and device, electronic equipment and storage medium

The invention provides a defect detection method and apparatus, an electronic device and a storage medium. The method comprises the steps of obtaining a to-be-detected image for a to-be-detected chip; wherein the surface of the to-be-tested chip comprises N sphere structures; n is an integer greater...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUO XULONG, ZHANG WUJIE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a defect detection method and apparatus, an electronic device and a storage medium. The method comprises the steps of obtaining a to-be-detected image for a to-be-detected chip; wherein the surface of the to-be-tested chip comprises N sphere structures; n is an integer greater than or equal to 1; determining a first position parameter of the to-be-tested chip in the to-be-tested image; determining a conversion parameter of the to-be-tested image according to a first position parameter of the to-be-tested chip in the to-be-tested image and a second position parameter of the to-be-tested chip in the reference image; converting a to-be-detected image by using the conversion parameter to obtain a target image; based on the target image and the reference image, determining detection related parameters for the surface sphere structure of the to-be-detected chip; obtaining a detection result of the to-be-detected chip based on the detection related parameters; the detection result is used for