Automatic optical detection system for wafer and image processing method thereof

The invention discloses an automatic optical detection system for a wafer and an image processing method thereof, which are mainly characterized in that a rotary motor is arranged on a machine table body, a wafer bearing table is arranged on the rotary motor to rotate, and a wafer to be detected is placed on the wafer bearing table; a linear scanning camera is arranged above the wafer bearing table to obtain a rectangular edge image of the wafer to be detected, and the obtained rectangular edge image is converted into a visual coordinate image marked with defect spots through an image processing device; according to the wafer detection system and the wafer detection method, the image processing technology and the visual interface device are utilized, the position of the defect is confirmed in an easy and visual mode, the workload of manual reinspection is reduced, and the purposes of improving the wafer detection efficiency and the detection quality are achieved. 本申请公开了一种用在晶圆的自动光学检测系统及其影像处理方法，主要是将一旋转马达设置在一机台本