Cascade structure photoconductive switch for improving microwave generation efficiency and preparation method thereof

The invention provides a cascade structure photoconductive switch capable of improving microwave generation efficiency and a preparation method thereof. Comprising a first semiconductor substrate, a second semiconductor substrate, a first ohmic contact electrode, a second ohmic contact electrode, a third ohmic contact electrode, a fourth ohmic contact electrode, a first transparent electrode, a second transparent electrode, a third transparent electrode, a fourth transparent electrode and a connecting electrode. Cascade connection of switch inter-stage capacitors is achieved through cascade connection of semiconductor substrate materials, the problems that an output waveform modulation degree of an existing vertical photoconductive switch is poor under the high-frequency condition, microwave conversion efficiency is low and the like are solved, the inter-stage capacitance of the photoconductive switch obtained through cascade connection under the high-frequency condition is reduced, and the microwave conversi