Online detection method and online detection circuit for electrode gap of micro-hemisphere gyroscope

The invention relates to a micro-hemispherical gyroscope electrode gap online detection method and circuit, and relates to the field of micromechanical sensors, the method comprises the following steps: S1, driving a micro-hemispherical resonator gyroscope to generate a breathing mode of constant amplitude vibration; s2, based on the breathing mode of the micro-hemispherical resonator gyroscope, collecting the capacitance variation of the electrode at any position; s3, signal processing is carried out based on the capacitance variable quantity, and the capacitance variable quantity is converted into a voltage signal containing electrode gap information; and S4, carrying out data conversion on the voltage signal to obtain the electrode gap of the electrode. According to the detection method, the working mode and the assembly state of the micro-hemispherical resonator gyroscope cannot be influenced, the sizes of all electrode gaps in the circumferential direction can be measured, the measurement method is more