Preparation process of alpha-nano aluminum oxide sapphire polishing solution, product prepared by preparation process and application of alpha-nano aluminum oxide sapphire polishing solution

The invention relates to a preparation process of an alpha-nano aluminum oxide sapphire polishing solution as well as a product and application of the alpha-nano aluminum oxide sapphire polishing solution. The preparation process comprises the following steps: preparing an alpha-nano aluminum oxide...

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Hauptverfasser: CHEN HONGWEN, QIU JIAHAO, MOU XINYU, ZHENG YUECANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a preparation process of an alpha-nano aluminum oxide sapphire polishing solution as well as a product and application of the alpha-nano aluminum oxide sapphire polishing solution. The preparation process comprises the following steps: preparing an alpha-nano aluminum oxide (alpha-Al2O3) precursor solution, preparing a precursor through a spray drying process, obtaining alpha-nano aluminum oxide powder through low-temperature sintering, preparing the polishing solution and the like, and adjusting the size of secondary particles by adjusting the pH value and dispersing and separating means of a grinding machine, a centrifugal machine and the like. Additives, namely green organic alkali aminopropanol AMP, ethylene diamine tetraacetic acid dipotassium EDTA-2K and cetyltrimethylammonium bromide CTAB, are added in the preparation of the polishing solution. The alpha-nanometer aluminum oxide sapphire polishing solution prepared by the invention has the advantages of small average particle s