Refrigeration infrared detector and manufacturing method of chip thereof

The invention discloses a manufacturing method of a refrigeration infrared detector and a chip thereof, and belongs to the technical field of semiconductors, and the manufacturing method of the refrigeration infrared detector chip comprises the following steps: providing a chip on which a plurality of indium columns are formed, the chip is a device chip or a readout circuit chip for forming the refrigeration infrared detector; forming a photoresist layer on a carrier, and arranging one side, with the photoresist layer, of the carrier on the indium column for pressure welding; and removing the photoresist layer, and removing the carrier. According to the method, the carrier is coated with the photoresist, the photoresist layer is formed, the flat surface is formed, then the carrier and the chip are subjected to pressure welding, the pressure and the duration of pressure welding are controlled, indium columns with different heights can be extruded to the same height plane, and the uniformity of the indium colum