Deposition apparatus

The invention provides deposition equipment which comprises an induction coil, an induction heat generation unit and a reaction cavity, the induction coil is arranged on the periphery of the induction heat generation unit, the induction heat generation unit is arranged between the induction coil and the reaction cavity, and when the induction coil is powered on, the reaction cavity is communicated with the reaction cavity. The induction heat generation unit generates heat through induction so as to heat the reaction cavity, and the induction coil sequentially comprises a first coil group, a second coil group and a third coil group between the gas inlet and the gas outlet in the flowing direction of the process gas, the first coil group, the second coil group and the third coil group respectively have a first inner diameter, a second inner diameter and a third inner diameter, and the second inner diameter is larger than the first inner diameter and the third inner diameter. By adopting the deposition equipment