Substrate carrier clamp

The present invention relates to a substrate carrier jig provided with a plurality of upper and lower clamps, each of which is provided with a clamping magnet, in order to clamp and hold an edge portion of a substrate. According to the present invention, a substrate carrier jig provided with an upper clamp and a lower clamp is rotated at an inclined angle so as to uniformly process the surface of a substrate by a chemical such as an etching solution, and the retention of the chemical such as the etching solution can be reduced by minimizing the contact area of the substrate held by the upper clamp and the lower clamp. Further, a structure for inducing discharge of liquid and preventing retention of etching liquid is improved by forming first and second protruding portions protruding in different forms at positions in contact with the upper and lower sides of the substrate at the end portions of the upper and lower clamps. 本发明涉及一种基板载具夹具，为了夹紧把持基板的边缘部位而配备有在上、下部夹钳上分别配置有夹紧磁铁的多个上、下部夹钳，可以通过将配备有上、下部夹钳的基板载具夹具倾斜旋转成倾斜的角