Wafer carrier
A wafer carrier includes a carrier body. The bearing body has a top surface and a groove. The edge of the top face is provided with a flat edge section. The groove is formed by recessing the top surface. The recess is configured to receive at least a portion of the wafer. The carrier body includes a...
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| Zusammenfassung: | A wafer carrier includes a carrier body. The bearing body has a top surface and a groove. The edge of the top face is provided with a flat edge section. The groove is formed by recessing the top surface. The recess is configured to receive at least a portion of the wafer. The carrier body includes an opaque material. Therefore, the silicon carbide wafer can be suitable for various existing wafer pre-alignment systems and overlay pattern measuring machines.
一种晶圆载具包括承载主体。承载主体具有顶面与凹槽。顶面的边缘具有平边段。凹槽由顶面凹陷形成。凹槽配置以容纳晶圆的至少一部分。承载主体包括不透光材料。使碳化硅晶圆能适用于各种现有的晶圆预对准系统与叠对图形测量机台。 |
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