Electrostatic bonding device for flexible solar cell packaging

An electrostatic bonding device for flexible solar cell packaging relates to the technical field of microelectronic device packaging, solves the technical problems that the electrostatic bonding device is complex in structure, high in manufacturing cost and use cost and unstable in bonding quality,...

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Bibliographische Detailangaben
Hauptverfasser: YIN XU, XU ZHAOQI, ZHANG LEI, LIU SHUWEN, MENG QINGSEN, YU XIUXIU, WANG YAKE, WANG QIANG, LIU CUIRONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An electrostatic bonding device for flexible solar cell packaging relates to the technical field of microelectronic device packaging, solves the technical problems that the electrostatic bonding device is complex in structure, high in manufacturing cost and use cost and unstable in bonding quality, and comprises a bonding assembly, a power supply assembly, a heating device and an insulating cover body, the bonding assembly comprises a bonding chamber, a heating part, a supporting part, an air supply part and a pressure applying part; the supporting part comprises a supporting table which can move in the bonding chamber; the gas supply part is used for filling inert gas into the bonding chamber, and the pressure applying part comprises a pressure applying lead screw which is matched with the supporting part to compress the material sample; the power supply assembly is connected with a power supply, and is connected with the pressing lead screw and the supporting table; the heating device is provided with an on