Mask adapter and device manufacturing method

The invention provides a mask adapter, a mounting tool thereof, an exposure apparatus and a device manufacturing method, which can improve the exposure precision of the exposure apparatus. According to one embodiment, the mask adapter is used in an exposure device which illuminates a mask supported on a platform and exposes a pattern formed on the mask on a substrate, and the mask adapter is installed on the mask. Comprising a supporting part for supporting the mask outside an area where the pattern is formed, and a supported part supported on the platform; and a first detected portion on the body portion, detectable by a detection portion of the exposure apparatus, and including information related to the mask adapter. 本发明提供一种掩模配接器、其安装工具、曝光装置以及元件制造方法，可提高曝光装置的曝光精度。本发明的掩模配接器的一形态是在对支撑于平台的掩模进行照明而将形成于所述掩模的图案曝光于基板上的曝光装置中使用且安装于所述掩模的掩模配接器，其包括：本体部，包括在形成有所述图案的区域外支撑所述掩模的支撑部、及支撑于所述平台的被支撑部；以及第一被检测部，在所述本体部上，能够利用所述曝光装置的检测部来检测，并且所述第一被检测部包含与所述掩模配接器相关的信息。