Ion beam deposition system

The invention discloses an ion beam deposition system which comprises a slide holder and a compression ring, and the compression ring is located above the slide holder and can move in the axis direction of the slide holder; the comparison sheet disc is of an annular structure and is arranged on the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU PENGFEI, GENG BIN, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, SANG KANG, HU DONGDONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention discloses an ion beam deposition system which comprises a slide holder and a compression ring, and the compression ring is located above the slide holder and can move in the axis direction of the slide holder; the comparison sheet disc is of an annular structure and is arranged on the periphery of the slide holder, and the comparison sheet disc is provided with a plurality of sheet positions for installing comparison sheets in the circumferential direction of the comparison sheet disc; the pressing ring is provided with a light-transmitting hole, and the shape of the light-transmitting hole is matched with that of the comparison piece; the pressing ring is in limiting connection with the slide holder in the circumferential direction and can cover the comparison disc; the slide holder and the comparison disc can rotate together and can also rotate relative to each other. Through structural optimization, the automatic switching operation of a plurality of comparison sheets can be realized without