Ion beam deposition system
The invention discloses an ion beam deposition system which comprises a slide holder and a compression ring, and the compression ring is located above the slide holder and can move in the axis direction of the slide holder; the comparison sheet disc is of an annular structure and is arranged on the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an ion beam deposition system which comprises a slide holder and a compression ring, and the compression ring is located above the slide holder and can move in the axis direction of the slide holder; the comparison sheet disc is of an annular structure and is arranged on the periphery of the slide holder, and the comparison sheet disc is provided with a plurality of sheet positions for installing comparison sheets in the circumferential direction of the comparison sheet disc; the pressing ring is provided with a light-transmitting hole, and the shape of the light-transmitting hole is matched with that of the comparison piece; the pressing ring is in limiting connection with the slide holder in the circumferential direction and can cover the comparison disc; the slide holder and the comparison disc can rotate together and can also rotate relative to each other. Through structural optimization, the automatic switching operation of a plurality of comparison sheets can be realized without |
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