Semiconductor device

A semiconductor device is disclosed. The semiconductor device includes: a gate stack structure including gate patterns and insulating patterns alternately stacked with each other; a gate insulating layer on a sidewall of the gate stack structure; a channel layer surrounded by the gate insulating lay...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WOO JONG-HO, KIM KYONG-HUN, LU YINGZHI, WOO MYUNG-HUN, KANG JOO-HEON
Format: Patent
Sprache:chi ; eng
Schlagworte:
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