Semiconductor device

A semiconductor device includes: a first insulating layer disposed on a substrate; a lower gate pattern disposed on the first insulating layer; a second insulating layer covering at least a portion of the lower gate pattern; a first lower gate insulating layer disposed on the lower gate pattern and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KWON MIN JIN, SUN HYUN JUNG, LEE WON SEOK, CHO MIN-HEE, RYU MIN-TAE, LEE SEUNG-BAEK
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor device includes: a first insulating layer disposed on a substrate; a lower gate pattern disposed on the first insulating layer; a second insulating layer covering at least a portion of the lower gate pattern; a first lower gate insulating layer disposed on the lower gate pattern and the second insulating layer; a source pattern and a drain pattern disposed on the first lower gate insulating layer, where the source pattern and the drain pattern are spaced apart from each other to include a trench facing the lower gate pattern; an oxide semiconductor layer formed along surfaces of the source and drain patterns and a bottom surface of the trench; an upper gate insulating layer disposed on the oxide semiconductor layer; and an upper gate pattern disposed on the upper gate insulating layer and filling the trench. 一种半导体装置,包括:第一绝缘层,其设置在衬底上;下栅极图案,其设置在第一绝缘层上;第二绝缘层,其覆盖下栅极图案的至少一部分;第一下栅极绝缘层,其设置在下栅极图案和第二绝缘层上;源极图案和漏极图案,其设置在第一下栅极绝缘层上,其中,源极图案和漏极图案彼此间隔开以包括面对下栅极图案的沟槽;氧化物半导体层,其沿源极图案和漏极图案的表面以及沟槽的底表面形成;上栅极绝缘层,其设置在