Elliptic polarization measurement photoelastic sensing unit modeling analysis and simulation method based on piezoelectric effect

The invention discloses an electricity-elasticity-light multi-physics field coupling simulation method based on an ellipsometric detection sensing unit, which realizes electricity, solid mechanics and optical multi-physics field coupling simulation, has certain guiding significance for novel space charge measurement system optical path design and sensor response analysis, and specifically comprises the following steps: (1) on the basis of COMSOL simulation software, carrying out simulation on a space charge measurement system; building a regular hexagon photoelastic sensor three-dimensional model by referring to the optimal elastic wave sensing physical structure; (2) according to the ellipsometry detection principle, the detection end perfects the optical path modeling of the photoelastic sensing unit, and the excitation end establishes a piezoelectric actuator model; (3) performing characteristic frequency analysis on the piezoelectric actuator model to obtain a piezoelectric actuator voltage frequency set