Light adjustment device, laser processing device, and light adjustment method

The present invention provides a light adjustment device and the like capable of appropriately adjusting the state of each of a plurality of light passing through an optical element. The laser processing apparatus includes: a first temperature adjustment unit that adjusts a temperature of a first ac...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: ENNYU NAOAKI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention provides a light adjustment device and the like capable of appropriately adjusting the state of each of a plurality of light passing through an optical element. The laser processing apparatus includes: a first temperature adjustment unit that adjusts a temperature of a first acousto-optic element that performs a first optical process on a first laser beam; a second temperature adjustment unit that adjusts the temperature of a second acousto-optic element that performs second optical processing on the second laser light; a first beam sensor that acquires a first measurement result of the first laser beam that has passed through the first acousto-optic element; a second beam sensor that acquires a second measurement result of the second laser beam that has passed through the second acousto-optic element; a temperature control unit that controls at least one of the first temperature control unit and the second temperature control unit on the basis of a comparison between the first measureme