Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus
A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group;...
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| creator | CHA MINCHEOL JUNG KIAE AN BYOUNG-GU CHO WON-SEOK CHO YUN-HYUNG KIM KYUNG-HAN PARK JAE-MOCK |
| description | A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group; a heater in the crucible group for heating the crucible group to evaporate the deposition source through the ejection unit; and a heat radiation prevention plate surrounding the injection unit to block heat radiation of a side surface of the injection unit. At least one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.
公开了一种沉积源蒸发设备和制造沉积源蒸发设备的方法。该沉积源蒸发设备包括：坩埚组，用于容纳沉积源；喷射单元，位于坩埚组上；加热器，位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源；以及防热辐射板，围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。 |
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公开了一种沉积源蒸发设备和制造沉积源蒸发设备的方法。该沉积源蒸发设备包括：坩埚组，用于容纳沉积源；喷射单元，位于坩埚组上；加热器，位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源；以及防热辐射板，围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240517&DB=EPODOC&CC=CN&NR=118048611A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240517&DB=EPODOC&CC=CN&NR=118048611A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHA MINCHEOL</creatorcontrib><creatorcontrib>JUNG KIAE</creatorcontrib><creatorcontrib>AN BYOUNG-GU</creatorcontrib><creatorcontrib>CHO WON-SEOK</creatorcontrib><creatorcontrib>CHO YUN-HYUNG</creatorcontrib><creatorcontrib>KIM KYUNG-HAN</creatorcontrib><creatorcontrib>PARK JAE-MOCK</creatorcontrib><title>Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus</title><description>A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group; a heater in the crucible group for heating the crucible group to evaporate the deposition source through the ejection unit; and a heat radiation prevention plate surrounding the injection unit to block heat radiation of a side surface of the injection unit. At least one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.
公开了一种沉积源蒸发设备和制造沉积源蒸发设备的方法。该沉积源蒸发设备包括：坩埚组，用于容纳沉积源；喷射单元，位于坩埚组上；加热器，位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源；以及防热辐射板，围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZMh2SS3IL84syczPUyjOLy1KTlVILUssyC9KBAslFhQkApmlxQqJeSkKuaklGfkpCvlpCrmJeaVpicklpUWZeekKKcSZwcPAmpaYU5zKC6W5GRTdXEOcPXSB2uNTiwsSk1PzUkvinf0MDS0MTCzMDA0djYlRAwDAw0Mb</recordid><startdate>20240517</startdate><enddate>20240517</enddate><creator>CHA MINCHEOL</creator><creator>JUNG KIAE</creator><creator>AN BYOUNG-GU</creator><creator>CHO WON-SEOK</creator><creator>CHO YUN-HYUNG</creator><creator>KIM KYUNG-HAN</creator><creator>PARK JAE-MOCK</creator><scope>EVB</scope></search><sort><creationdate>20240517</creationdate><title>Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus</title><author>CHA MINCHEOL ; JUNG KIAE ; AN BYOUNG-GU ; CHO WON-SEOK ; CHO YUN-HYUNG ; KIM KYUNG-HAN ; PARK JAE-MOCK</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN118048611A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>CHA MINCHEOL</creatorcontrib><creatorcontrib>JUNG KIAE</creatorcontrib><creatorcontrib>AN BYOUNG-GU</creatorcontrib><creatorcontrib>CHO WON-SEOK</creatorcontrib><creatorcontrib>CHO YUN-HYUNG</creatorcontrib><creatorcontrib>KIM KYUNG-HAN</creatorcontrib><creatorcontrib>PARK JAE-MOCK</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHA MINCHEOL</au><au>JUNG KIAE</au><au>AN BYOUNG-GU</au><au>CHO WON-SEOK</au><au>CHO YUN-HYUNG</au><au>KIM KYUNG-HAN</au><au>PARK JAE-MOCK</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus</title><date>2024-05-17</date><risdate>2024</risdate><abstract>A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group; a heater in the crucible group for heating the crucible group to evaporate the deposition source through the ejection unit; and a heat radiation prevention plate surrounding the injection unit to block heat radiation of a side surface of the injection unit. At least one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.
公开了一种沉积源蒸发设备和制造沉积源蒸发设备的方法。该沉积源蒸发设备包括：坩埚组，用于容纳沉积源；喷射单元，位于坩埚组上；加热器，位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源；以及防热辐射板，围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus |
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