Deposition source evaporation apparatus and method of manufacturing deposition source evaporation apparatus
A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group;...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A deposition source evaporation apparatus and a method of manufacturing the deposition source evaporation apparatus are disclosed. The deposition source evaporation equipment comprises a crucible group used for accommodating a deposition source; the spraying unit is positioned on the crucible group; a heater in the crucible group for heating the crucible group to evaporate the deposition source through the ejection unit; and a heat radiation prevention plate surrounding the injection unit to block heat radiation of a side surface of the injection unit. At least one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.
公开了一种沉积源蒸发设备和制造沉积源蒸发设备的方法。该沉积源蒸发设备包括:坩埚组,用于容纳沉积源;喷射单元,位于坩埚组上;加热器,位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源;以及防热辐射板,围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。 |
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