Electrostatic discharge protection device and manufacturing method thereof

The invention provides an electrostatic discharge protection device and a manufacturing method thereof. The electrostatic discharge protection device comprises a gate structure, a plurality of first doped regions and a plurality of second doped regions, the gate structure is on the substrate. The ga...

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Hauptverfasser: SU GUANCHENG, TANG TIANHAO, ZHANG ZHIXIANG, CAI YINJIA, ZHAO MEILING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides an electrostatic discharge protection device and a manufacturing method thereof. The electrostatic discharge protection device comprises a gate structure, a plurality of first doped regions and a plurality of second doped regions, the gate structure is on the substrate. The gate structure comprises a main body part and a plurality of extension parts, the plurality of extension parts are connected with the main body part, and the extension directions of the main body part and the plurality of extension parts are different. And the plurality of first doped regions are arranged in the substrate among the plurality of extension parts. And the plurality of second doped regions are arranged in the substrate on the two outer sides of the plurality of extension parts. The plurality of first doped regions and the plurality of second doped regions have different conductivity types. 本发明提供一种静电放电保护装置及其制造方法,其中该静电放电保护装置包括:栅极结构、多个第一掺杂区以及多个第二掺杂区。栅极结构在衬底上。所述栅极结构包括主体部与多个延伸部,所述多个延伸部与所述主体部连接,且所述主体部与所述多个延伸部的