High-transparency magnesium oxide target material and preparation method thereof

The invention relates to the technical field of ceramic targets, in particular to a high-transparency magnesium oxide target and a preparation method thereof. The target material is prepared from large-particle magnesium oxide powder, small-particle magnesium oxide powder and a binder, the dosage ra...

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Bibliographische Detailangaben
Hauptverfasser: FAN ZHENQING, WANG LIUTU, LI YANGYANG, ZHANG YAMENG, ZHENG HAIQIANG, ZHAO ZELIANG, WANG YONGCHAO, FENG YUE, SHI HAOJIE, LI XINRAN, DUAN YUQI, GUO XUEKE, WANG WEITAO
Format: Patent
Sprache:chi ; eng
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