High-transparency magnesium oxide target material and preparation method thereof

The invention relates to the technical field of ceramic targets, in particular to a high-transparency magnesium oxide target and a preparation method thereof. The target material is prepared from large-particle magnesium oxide powder, small-particle magnesium oxide powder and a binder, the dosage ratio of the large-particle magnesium oxide powder to the small-particle magnesium oxide powder is (6-8): 3, the average particle size of the large-particle magnesium oxide powder is 140-270 nm, and the average particle size of the small-particle magnesium oxide powder is 20-30 nm. The preparation method of the high-transparency magnesium oxide target material comprises the following steps: (1) mixing large-particle magnesium oxide powder and small-particle magnesium oxide powder; (2) carrying out compression molding on the magnesium oxide mixed in the step (1) to obtain a magnesium oxide biscuit; (3) baking the magnesium oxide biscuit obtained in the step (2) at low temperature; (4) sintering the magnesium oxide bis