Acid mist suppression in copper electrolytic deposition

A method of acid mist suppression in copper electrolytic deposition is described. In various embodiments, at least one liquid licorice root extract, powdered licorice root extract, or reconstituted licorice root extract is added to an acidic electrolyte solution of a copper electrodeposition process in a sufficient amount to inhibit acid mist from the acidic electrolyte solution during the copper electrodeposition process. In various embodiments, the combination of licorice extract and surfactant exhibits a synergistic effect of acid mist inhibition during copper electrolytic deposition. 描述了一种铜电解沉积中酸雾抑制的方法。在各种实施方案中，将至少一种液体甘草根提取物、粉末状甘草根提取物或重构甘草提取物以足够的量加入到铜电解沉积工艺的酸性电解质溶液中，以抑制铜电解沉积工艺期间来自酸性电解质溶液的酸雾。在各种实施方案中，甘草提取物和表面活性剂的组合在铜电解沉积期间显示出酸雾抑制的协同作用。