Deposition furnace air inlet structure for silicon carbide coating production

The invention relates to the technical field of deposition equipment, discloses a deposition furnace air inlet structure for silicon carbide coating production, and aims to solve the problem that the overall quality of a part is affected due to the fact that the thicknesses of deposition films at al...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YU WEIHUA, WANG XUN, LU SHAN, HUANG XIUKANG, WANG BIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of deposition equipment, discloses a deposition furnace air inlet structure for silicon carbide coating production, and aims to solve the problem that the overall quality of a part is affected due to the fact that the thicknesses of deposition films at all positions of the surface of the part are different. Through the arrangement of the gas inlet chamber and the flow dividing holes, reaction gas input into the furnace body through the gas inlet pipe is collected through the gas inlet chamber, then the gas is discharged to the bearing table through the flow dividing holes, and due to the fact that the flow dividing holes are evenly distributed above the bearing table, the follow-up reaction gas is more evenly in contact with parts on the surface of the bearing table; through the arrangement of a gas inlet chamber and a stirring rod, reaction gas in the gas inlet chamber is dispersed through stirring of the stirring rod, so that the gas amount of subsequent gas disc