Phase synchronization device and method, radio frequency power supply and plasma equipment

The invention relates to a phase synchronization device and method, a radio frequency power supply and plasma equipment. Belongs to the technical field of radio frequency power supplies, solves the problem of phase synchronization of a radio frequency power supply host and a slave, and comprises a cavity signal feedback loop used for establishing a feedback channel from a vacuum cavity powered by a local radio frequency power supply to a phase shift unit; frequency information collected from the vacuum cavity is fed back to the phase shift unit through the feedback channel to perform phase shift processing on a local clock signal, and control information is output to control an output signal phase of a local radio frequency power supply. According to the invention, the phase fluctuation caused by the last-stage power amplifier is dynamically offset, and the phase synchronization of the radio frequency power supply host and the slave is realized. 本发明涉及一种相位同步装置和方法、射频电源及等离子体设备；属于射频电源技术领域，解决射频电源主机和从机的相位同步问题，相位同步装