Purification device and purification method of hexachlorodisilane
The invention discloses a hexachlorodisilane purification device and a purification method thereof.The hexachlorodisilane purification device comprises a plurality of electrode sets used for removing metal impurities through oxidation-reduction reaction on positive electrodes and negative electrodes...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a hexachlorodisilane purification device and a purification method thereof.The hexachlorodisilane purification device comprises a plurality of electrode sets used for removing metal impurities through oxidation-reduction reaction on positive electrodes and negative electrodes of the electrode sets; the electrolysis impurity removal tank is of a closed structure, the electrode sets are installed in the electrolysis impurity removal tank, and the multiple electrode sets are sequentially arranged in the electrolysis impurity removal tank in the flowing direction of raw materials; the side wall of the electrolytic impurity removal tank is provided with a liquid feeding port, a liquid discharging port, a shielding gas connector and an exhaust port; the circulating pipeline is respectively communicated with the circulating liquid inlet and the circulating liquid outlet of the electrolytic impurity removal tank; and the circulating pump is arranged on the circulating pipeline and is used for |
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