Image simulation method, pseudo-random defect data set generation method and micro-nano defect detection method

The invention discloses an image simulation method, a pseudo-random defect data set generation method and a micro-nano defect detection method. The image simulation generation method comprises the following steps: constructing a simulation three-dimensional model based on model parameters; constructing a simulation Kohler illumination model based on the light source parameters, and taking the similarity change degree of the synthetic image under the increment of the sampling points of the aperture diaphragm as a criterion of simulation approximate convergence so as to determine the sampling number comprehensively considering the simulation cost and precision; and performing optical simulation based on the simulation three-dimensional model and the simulation Kohler illumination model to obtain a simulation image. According to the method, the generation of the pseudo-random defect data set can be further realized on the basis of obtaining a large number of simulation images, and when a large number of data set