Method for detecting abnormity of water channel of semiconductor chip high and low temperature test system

The invention discloses a semiconductor chip high and low temperature test system water channel abnormity detection method comprising the following steps: S1, arranging a temperature sensor at a water outlet of a multi-flow-channel water cooling heat exchanger, and monitoring the temperature change...

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Bibliographische Detailangaben
Hauptverfasser: WANG JIE, LIU JUN, LI SHIYU, LI XIANFEI, TAO XIANGQIAN, TU YUNLONG
Format: Patent
Sprache:chi ; eng
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