Creating processing model using element map information from x-ray energy dispersive spectroscopy line scan analysis

The disclosed embodiments describe a method that uses a model to predict changes in a physical state of a sample caused by one or more stages of a technical process in a substrate processing apparatus and to obtain imaging data associated with actual execution of the one or more stages of the techni...

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Bibliographische Detailangaben

Hauptverfasser:	NARAYANAN SUDARSHAN, SETHURAMAN ANANTHA R
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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