Creating processing model using element map information from x-ray energy dispersive spectroscopy line scan analysis

The disclosed embodiments describe a method that uses a model to predict changes in a physical state of a sample caused by one or more stages of a technical process in a substrate processing apparatus and to obtain imaging data associated with actual execution of the one or more stages of the technical process. The imaging data includes a distribution of one or more chemical elements of a plurality of regions of the sample. The method further includes identifying, based on the imaging data, a difference between the predicted change in the physical state of the sample and an actual change in the physical state of the sample caused by the actual execution of the one or more stages of the technical process. The method further includes determining a parameter of the model based on the identified difference. 所揭示的实施方式描述了一种方法，其使用模型来预测由基板处理设备中的技术过程的一或多个阶段引起的样品物理状态的变化，并获得与技术过程的一或多个阶段的实际执行相关联的成像数据。成像数据包括样品的多个区域的一或多种化学元素的分布。方法进一步包括，基于成像数据，识别样品的物理状态的预测变化与由技术过程的一或多个阶段的实际执行引起的样品的物理状态的实际变化之间的差异。方法进一步包括基于所识别的差异确定模型的参数。