Micro-LED chip flexible flying chip piercing device and control method

The invention discloses a Micro-LED chip flexible flying wafer-pricking device and a control method. The device comprises a micro-motion platform, a flexible flying wafer-pricking device and a flexible flying wafer-pricking device, the micro-motion platform comprises a micro-motion platform controll...

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Bibliographische Detailangaben
Hauptverfasser: LIU ZIYANG, CHEN XIN, CHEN XUN, SUN JIANFENG, SONG JIACHENG, LAUSDE, XIE CONGKAI, YAO JINGSONG, CHENG JIANCONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a Micro-LED chip flexible flying wafer-pricking device and a control method. The device comprises a micro-motion platform, a flexible flying wafer-pricking device and a flexible flying wafer-pricking device, the micro-motion platform comprises a micro-motion platform controller, a voice coil motor, a driving frame, piezoelectric ceramics, a bridge type amplification mechanism and a lever amplification mechanism. The micro-motion platform controller is electrically connected with the voice coil motor and the piezoelectric ceramic and used for controlling the voice coil motor to push the driving frame so as to drive the pricking needle to move transversely and controlling the piezoelectric ceramic to axially stretch and contract according to the preset working frequency so that the bridge type amplification mechanism and the lever amplification mechanism can move longitudinally. And then the pricking needle is driven to do longitudinal reciprocating motion. According to the invention, th