Multi-circle layered crystal bar cooling device

The invention relates to the technical field of semiconductor material production equipment, and discloses a multi-circle layered crystal bar cooling device which comprises a connector, the bottom of the connector is fixedly connected with a connecting rod, one side of the connecting rod is fixedly...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHENG XUBING, XIN LIHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of semiconductor material production equipment, and discloses a multi-circle layered crystal bar cooling device which comprises a connector, the bottom of the connector is fixedly connected with a connecting rod, one side of the connecting rod is fixedly connected with a positioning block, the bottom of the positioning block is fixedly connected with a fixing rod, and the fixing rod is fixedly sleeved with a fixing ring. The bottom of the fixing rod is fixedly connected with a cooling assembly; the cooling assembly is used for cooling a crystal bar generated through machining, in the using process, the whole cooling device is installed and positioned through the positioning block, the bottom face of the water cooling screen and the liquid level of a raw material are located at a proper distance, and through water circulation in the cooling assembly in the cooling device, the crystal bar in the production process is cooled; and meanwhile, the use requirements of dif