Atomic layer permeation deposition composite film with strong AI-O bonding and preparation method thereof

The invention discloses an atomic layer permeation deposition composite film with strong AI-O bonding, which comprises an organic layer, an organic-inorganic hybrid layer and an inorganic layer, the organic layer is PET, PEN or PI, the inorganic layer is aluminum oxide, titanium oxide or zirconium oxide, and the organic-inorganic hybrid layer is a composite layer formed by the organic layer and the inorganic layer. The invention provides a method for improving the adhesive ability of an inorganic coating material in an organic substrate and on the surface of the organic substrate, and the method is used for forming a compact organic-inorganic hybrid layer with AI-O bonding in the flexible substrate and forming an inorganic film layer with AI-O bonding on the surface of the flexible substrate. The invention relates to corona treatment of a flexible substrate so as to improve the adhesion and combination capability of an inorganic coating on the surface and inside of the flexible substrate, and is especially su