SEMICONDUCTOR MEASUREMENT DEVICE

A semiconductor measurement apparatus is disclosed. The semiconductor measurement apparatus includes: an illuminator configured to output light having a first wavelength band and light having a second wavelength band different from the first wavelength band; an objective table on which a test object is placed; a camera configured to receive light reflected or scattered from or transmitted through the test object; and a controller configured to control the illuminator and the camera, and measure a plurality of structures included in the test object based on information indicated by the light received by the camera. The controller is configured to set an exposure time of the camera to a first exposure time when the illuminator outputs the light having the first wavelength band, and to set the exposure time of the camera to a second exposure time different from the first exposure time when the illuminator outputs the light having the second wavelength band. 公开了半导体测量设备。所述半导体测量设备包括：照明器，被配置为输出具有第一波长带的光和具有与第一波长带不同的第