TEG CIRCUIT, SEMICONDUCTOR DEVICE, AND TEG CIRCUIT TESTING METHOD

An embodiment provides a test element group (TEG) circuit including: a first pad configured to receive a test voltage to be supplied; an amplifier including a first input terminal connected to the first pad, a second input terminal connected to the first terminal of the test transistor, and an output terminal electrically connected to the second input terminal; a variable resistor including one terminal connected to the output terminal of the amplifier and another terminal connected to the first terminal of the test transistor; and a gate driving circuit supplying a gate voltage to the gate of the test transistor. 实施例提供了一种测试元件组(TEG)电路，包括：第一焊盘，被配置为接收要供应的测试电压；放大器，包括连接到第一焊盘的第一输入端子、连接到测试晶体管的第一端子的第二输入端子、以及电连接到第二输入端子的输出端子；可变电阻器，包括连接到放大器的输出端子的一个端子和连接到测试晶体管的第一端子的另一端子；以及栅极驱动电路，向测试晶体管的栅极供应栅极电压。