Novel precision rotary table rotation amount measuring device and error compensation method
The invention discloses a novel precision rotary table rotation amount measuring device and an error compensation method, and belongs to the technical field of precision testing technologies and instruments. The device is composed of a rotary table rotating unit, a motion conversion unit and a two-d...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a novel precision rotary table rotation amount measuring device and an error compensation method, and belongs to the technical field of precision testing technologies and instruments. The device is composed of a rotary table rotating unit, a motion conversion unit and a two-dimensional coordinate acquisition unit. The motion conversion unit adopts two-dimensional symmetrically distributed linear gratings to convert the rotary motion of the rotary table into the linear motion of the linear gratings, the cost is reduced while the high precision is ensured, and the two-dimensional coordinate acquisition unit can synchronously acquire measuring points and calculate the numerical value of the rotation amount in combination with the arc tangent principle; according to the provided error compensation method, the eccentricity and the installation deflection angle are solved based on the principle of least squares, the influence of Abbe errors and installation errors can be effectively reduced, |
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