Vacuum pump, switching device for vacuum pump and vacuum pump equipment
The invention provides a vacuum pump, a switching device for the vacuum pump and vacuum pump equipment. The vacuum pump comprises a pump inlet, a pump outlet and a pump main shell, a working cavity is formed in the pump main shell, vacuum pump blades are contained in the working cavity, and one or m...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a vacuum pump, a switching device for the vacuum pump and vacuum pump equipment. The vacuum pump comprises a pump inlet, a pump outlet and a pump main shell, a working cavity is formed in the pump main shell, vacuum pump blades are contained in the working cavity, and one or more blowing device connectors and one or more blowing air holes are formed in the position, close to the pump inlet, of the pump main shell. The purging device interface is used for being connected with an external gas supply device, the purging device interface is communicated with the purging gas hole, the vacuum pump has a working state and a purging state, in the working state, the purging device interface is closed, in the purging state, the purging device interface is opened, and in the purging state, the purging device interface is opened. Pressure gas enters the pump main shell through the purging gas hole and purges the blades in the pump main shell and the working cavity of the blades, and then the gas is |
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