Rotating shaft for silicon carbide crystal growth furnace and crucible driving and rotating device for crystal growth furnace

The invention discloses a rotating shaft for a silicon carbide crystal growth furnace and a crucible driving rotating device for the crystal growth furnace, the rotating shaft comprises an inner core tube, a middle tube sleeving the outer side of the inner core tube and an outer tube sleeving the ou...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LI HUI, ZHANG PEI, LU YOUFENG, ZHANG JUN, MAO RUICHUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BEARINGS BLASTING CHEMISTRY CRYSTAL GROWTH CYLINDERS ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MECHANICAL ENGINEERING METALLURGY PHYSICS PISTONS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL ROTARY BODIES OTHER THAN GEARING ELEMENTS SEALINGS SHAFTS SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TESTING THERMAL INSULATION IN GENERAL THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention discloses a rotating shaft for a silicon carbide crystal growth furnace and a crucible driving rotating device for the crystal growth furnace, the rotating shaft comprises an inner core tube, a middle tube sleeving the outer side of the inner core tube and an outer tube sleeving the outer side of the middle tube, gaps are formed among the inner core tube, the middle tube and the outer tube, the upper ends of the inner core tube, the middle tube and the outer tube are fixedly connected through a positioning sleeve, and the inner core tube, the middle tube and the outer tube are fixedly connected through the positioning sleeve. The lower end faces of the inner core pipe, the middle pipe and the outer pipe are fixedly connected through conical joints, the positioning sleeve is provided with a plurality of water inlets, the water inlets are communicated with a gap between the inner core pipe and the middle pipe, the outer pipe is provided with a water outlet, and the water outlet is communicated wit