Plasma device for functional gradient modification of insulating surface based on airflow control

The invention discloses a plasma device for functional gradient modification of an insulating surface based on airflow control, and the key points of the technical scheme are that the plasma device comprises a streamline-shaped gas collecting and homogenizing gas path and a medium leakage concentrat...

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Bibliographische Detailangaben
Hauptverfasser: JIANG JIAJU, SHEN ZHANGLIANG, BAO JIARUI, CHU JINCHENG, XU JUNHAO, ZHU XI, FANG ZHI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a plasma device for functional gradient modification of an insulating surface based on airflow control, and the key points of the technical scheme are that the plasma device comprises a streamline-shaped gas collecting and homogenizing gas path and a medium leakage concentration gradient module communicated with the streamline-shaped gas collecting and homogenizing gas path, and the medium leakage concentration gradient module is communicated with a waste gas collecting module; the waste gas collection module is communicated with a waste gas treatment device; one end of the medium leakage concentration gradient module is communicated with a plasma reaction module; the device has the technical effects that the surface of the basin-type insulator can be modified under atmospheric pressure, a gradient decreasing film is deposited, the surface electric field intensity distribution of the basin-type insulator is improved, the electric field distortion at the three combination points of the