Single-cylinder-driven vacuum rectangular valve for sealing semiconductor process chamber

The invention discloses a single-cylinder-driven vacuum rectangular valve for sealing a semiconductor process chamber, and relates to the technical field of semiconductor vacuum valves. The valve comprises a valve plate, a valve plate seat is connected to the rear surface of the valve plate, a fixing seat is connected to the lower surface of a cavity connecting plate, an air cylinder mounting plate is connected to the lower end of a side plate, an air cylinder connecting seat is arranged at the upper end of the air cylinder mounting plate, and a transmission shaft seat is arranged between the cavity connecting plate and the air cylinder mounting plate. A transmission shaft is connected to the middle of the valve plate seat, a transmission shaft nut is arranged at the lower end of the transmission shaft, cam grooves are connected to the left side and the right side of the upper surface of the air cylinder connecting seat, bearings are connected to the left side and the right side of the transmission shaft seat