High-responsivity self-powered solar blind photoelectric detector and preparation method thereof

The invention discloses a high-responsivity self-powered solar blind photoelectric detector and a preparation method thereof. The method comprises the following steps: depositing a beta-Ga2O3 thin film on a substrate; a CuCrO2 thin film is grown in situ on a beta-Ga2O3 thin film through a radio frequency magnetron sputtering method, and the CuCrO2 thin film and the beta-Ga2O3 thin film form a heterojunction. According to the method, the CuCrO2 thin film is grown on the beta-Ga2O3 thin film in situ by using a radio frequency magnetron sputtering method, so that the preparation of the CuCrO2/beta-Ga2O3 heterojunction is completed. The steps of photoetching, etching and the like for preparing the CuCrO2/beta-Ga2O3 heterojunction photoelectric detector are omitted, the process complexity and the preparation cost are greatly reduced, and a simple and convenient method is provided for preparing a large number of CuCrO2/beta-Ga2O3 heterojunction photoelectric detectors. In addition, the CuCrO2 film grown by the meth