Sample injection device, system and method for ECR ion source sample injection

The invention provides a sample introduction device, system and method for ECR ion source sample introduction, and relates to the technical field of mass spectrometers and equipment. According to the sampling device, most solvents in salt solution atomized steam are pumped away through a negative pressure environment formed by the heating sleeve and the pump, and meanwhile, redundant samples can be removed; the atomization gas is prevented from being excessively condensed on the pipe wall under the heating of the heating sleeve, and a part of dry aerosol particles enter the separation container through the sample distribution holes. Secondary vacuum formed by the separation container and the vacuum ionization chamber of the ECR ion source plays a vacuum transition role, and the stability of sample introduction vacuum is maintained. The device provided by the invention can meet the continuous and stable atomization sampling of the metal salt solution. 本发明提供了一种用于ECR离子源进样的进样装置、系统及进样方法，涉及质谱仪器设备技术领域。该进样装置通过加热套和泵形成