Line spectrum confocal sensor

The invention discloses a line spectrum confocal sensor. The line spectrum confocal sensor comprises a cross light source module, a detection module and a detection module, the cross-shaped light source module is used for emitting a cross-shaped detection light beam to the detection module, the cros...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BAO CHUANCHEN, LI JINHUA, ZHU JIANGBING, YANG JUNCHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a line spectrum confocal sensor. The line spectrum confocal sensor comprises a cross light source module, a detection module and a detection module, the cross-shaped light source module is used for emitting a cross-shaped detection light beam to the detection module, the cross-shaped detection light beam comprises a first polarization detection light beam and a second polarization detection light beam, and the polarization directions and the contour extension directions of the two detection light beams are intersected; the detection module comprises a dispersion unit; the detection light beam is dispersed by the dispersion unit, then enters an object to be detected and is reflected by the object to be detected to form an imaging light beam; the detection module comprises a first cross diaphragm, a grating unit and an imaging detection unit; the imaging light beam is filtered by the first cross diaphragm to form a cross imaging light beam, the cross imaging light beam comprises a first