Method for improving iron and particles in annealing furnace body

The invention relates to a method for improving iron and particles in an annealing furnace body, which belongs to the technical field of silicon wafer processing, and comprises the following operation steps of: 1, cleaning and drying an SIC boat by using 49% HF (Hydrogen Fluoride), and then putting...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YE SHAOFENG, YAO SHENGPING, GAO HONGTAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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