Method for improving iron and particles in annealing furnace body

The invention relates to a method for improving iron and particles in an annealing furnace body, which belongs to the technical field of silicon wafer processing, and comprises the following operation steps of: 1, cleaning and drying an SIC boat by using 49% HF (Hydrogen Fluoride), and then putting the SIC boat into an annealing furnace; 2, 10-30 slm of oxygen is introduced into the quartz furnace tube, the SIC boat does not enter the furnace tube, and baking is conducted for 10-15 hours at the temperature of 1200 DEG C; and thirdly, 10-30 slm of argon is used, the temperature is 1200 DEG C, and baking is conducted for 1-3 H. And 4, filling the SIC boat with a cleaned p-type light-doped dummy wafer, lifting the SIC boat into a quartz furnace tube, and baking the SIC boat at 1200 DEG C for 22 hours. And 5, respectively placing the monitoring sheets at the upper, middle and lower positions of the boat body, lifting the boat body into the quartz furnace tube, annealing at 1200 DEG C, and sending the measuring bo