Pressure head structure of silicon carbide seed crystal hot-pressing equipment

The invention provides a pressure head structure of silicon carbide seed crystal hot-pressing equipment. The pressure head structure comprises a hot-pressing furnace main body, a hydraulic cylinder is mounted at the top of the hot-pressing furnace main body, a water-cooling shaft is arranged below t...

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Bibliographische Detailangaben
Hauptverfasser: JIN ANZE, LAI ZHANGTIAN, TANG MING, XIA XIAOPING, CHEN SHILI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a pressure head structure of silicon carbide seed crystal hot-pressing equipment. The pressure head structure comprises a hot-pressing furnace main body, a hydraulic cylinder is mounted at the top of the hot-pressing furnace main body, a water-cooling shaft is arranged below the hydraulic cylinder and is a hollow water-cooling shaft, an inner pipe of the water-cooling shaft is a fixed water inlet pipe, and an outer pipe of the water-cooling shaft is a water outlet pipe; the hot-pressing furnace body further comprises a hot-pressing cavity, one end of the water-cooling shaft extends into the hot-pressing cavity, an upper graphite heating disc and a lower graphite heating disc are arranged in the hot-pressing cavity, the bottom of the water-cooling shaft is connected with the upper graphite heating disc through a spherical connecting rod, and the lower graphite heating disc is fixed to the bottom of the hot-pressing cavity. The hot pressing furnace body further comprises a heating electro