FAST BEAM CALIBRATION PROGRAM FOR BEAM LINE ION IMPLANTER
The invention provides a method comprising: receiving a spot beam profile of a spot ion beam; receiving a linear scanning beam profile of the spot ion beam; generating a calculated calibration point profile based on the point beam profile and the linear scanning beam profile; and implementing an adj...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a method comprising: receiving a spot beam profile of a spot ion beam; receiving a linear scanning beam profile of the spot ion beam; generating a calculated calibration point profile based on the point beam profile and the linear scanning beam profile; and implementing an adjusted scan profile of the point ion beam based on the calculated calibration point profile.
本发明提供一种方法，包含：接收点离子射束的点射束轮廓；接收点离子射束的线性扫描射束轮廓；基于点射束轮廓和线性扫描射束轮廓而产生计算的校准点轮廓；以及基于计算的校准点轮廓而实施点离子射束的调整的扫描轮廓。 |
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