Illumination alignment unit placing method and electronic equipment

The invention relates to an illumination alignment unit placing method and electronic equipment. The method comprises the following steps: carrying out primary placement on an illumination alignment unit relative to a specified area of a chip; acquiring a first coordinate value of each illumination alignment unit; judging whether the first coordinate value of each illumination alignment unit meets a preset process design rule requirement or not; and if the process design rule requirement is not met, correcting the position of the illumination alignment unit on the chip, aligning the illumination alignment unit to the corrected second coordinate value position, and obtaining a corrected chip design file. According to the illumination alignment unit placing method provided by the invention, the illumination alignment unit can be rapidly and accurately placed. 本申请涉及一种光照对准单元摆放方法及电子设备。所述方法包括：对光照对准单元相对芯片指定区域进行初次摆放；获取每个光照对准单元的第一坐标值；判断每个光照对准单元的第一坐标值是否满足预设的工艺设计规则要求；若不满足所述工艺设计规则要求，则对光照对准单元在芯片上的位置予以修正，将光照对准单元对准到修正后的第二坐标