Film thickness gauge

The invention discloses a film thickness gauge which comprises a lower probe and is characterized in that the upper side edge of the lower probe is fixedly connected with a vertical rod of an L-shaped supporting rod, the end of a transverse rod of the L-shaped supporting rod is connected with a supp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAO MINGJUAN, KANG FEIFEI, LI XUELIANG, HE GUANGBAO, LU YUNQIAO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention discloses a film thickness gauge which comprises a lower probe and is characterized in that the upper side edge of the lower probe is fixedly connected with a vertical rod of an L-shaped supporting rod, the end of a transverse rod of the L-shaped supporting rod is connected with a supporting shaft through a bearing, and the lower end of the supporting shaft is fixedly connected with one end of a straight groove rod; a vertical block of a T-shaped sliding block is arranged in a sliding groove of the straight groove rod, the lower end of the vertical block of the T-shaped sliding block is fixedly connected with an electric push rod, and the lower end of a telescopic rod of the electric push rod is fixedly connected with an upper probe. The lower probe and the upper probe are matched with each other to realize thickness measurement; the lower probe is a hollow cylinder, and the upper side of the lower probe is provided with a group of evenly distributed round holes. The device can measure the thick